Does NI notice that the R&D requirement of MEMS sensors
with "atto scale capacitance or inductance change?" In the past years,
we can only achieve the measurements by MS3110 or Agilent E4980A. But
they are not easy to be integrated with other equipments. The operiating
or measurement frequency of the sensors, for example MEMS microphone,
accelerometer, gyroscope, tactile sensor, is usually DC~100kHz, with aF
or aH capacitance or inductance change.
MS3110
http://www.irvine-sensors.com/Chips&Modules.html
On the other hand, which relay type of
switch/multiplex/matrix card is proper for the MS3110 or Agilent E4980A
with lower capacitance or inductance?
